Synthesis and properties of oligo- and polymethylsilazanes as a precursor for silicon nitride |
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| Authors: | Y Abe T Ozai Y Kuno Y Nagao and T Misono |
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| Affiliation: | (1) Department of Industrial Chemistry, Faculty of Science and Technology, Science University of Tokyo, 278 Noda, Chiba, Japan |
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| Abstract: | The synthesis and properties of polymethylsilazanes were investigated. Controlled ammonolysis of methyl(triisocyanato)silane (MTIS) at the molar ratios NH3/MTIS=4 and 6 gave polymethylsilazanes3 and4, which were soluble in tetrahydrofuran (THF) and dimethyl sulfoxide (DMSO) but insoluble when isolated as powders. The concentrated polymer solution showed spinnability and film formation. Thermogravimetric analysis of3 and4 showed weight losses of 67 and 16%, respectively. Species4 may be a precursor for silicon/carbon/nitrogen ceramics. |
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| Keywords: | Methyl(triisocyanato)silane ammonolysis polysilazane precursor silicon nitride |
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