| 兆位电路与高纯水 |
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| 引用本文： | 闻瑞梅. 兆位电路与高纯水[J]. 水处理技术, 1993, 19(1): 1-5 |
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| 作者姓名： | 闻瑞梅 |
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| 作者单位： | 中国科学院半导体研究所 北京，邮编:100083 |
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| 摘 要： |
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| 关 键 词： | 高纯水 集成电路 材料 |
THE MEGABIT INTEGRATED CIRCUITS AND ULTRAPURE WATER |
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| Wen Ruimei. THE MEGABIT INTEGRATED CIRCUITS AND ULTRAPURE WATER[J]. Technology of Water Treatment, 1993, 19(1): 1-5 |
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| Authors: | Wen Ruimei |
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| Abstract: | The relationships between megabit integrated circuits and ultrapure water and the techniques for decreasing total organic carbon (TOC) value of water are outlined in the paper.The characteristics of a new type of material for high purity water fabrication and a technique of water sterilization by ozone are also briefly evaluated. |
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| Keywords: | ultrapure water integrated circuits material |
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