| 气溶胶辅助化学气相沉积制备Al掺杂ZnO透明导电薄膜 |
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| 引用本文： | 秦秀娟,韩司慧智,赵琳,左华通,宋士涛.气溶胶辅助化学气相沉积制备Al掺杂ZnO透明导电薄膜[J].无机材料学报,2011,26(6):607-612. |
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| 作者姓名： | 秦秀娟 韩司慧智 赵琳 左华通 宋士涛 |
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| 作者单位： | (1. 燕山大学 环境与化学工程学院, 秦皇岛 066004; 2. 亚稳材料制备技术与科学国家重点实验室, 秦皇岛 066004; 3. 河北科技师范学院 理学院, 秦皇岛 066004) |
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| 基金项目： | 河北省自然科学基金(B2008000758)~~ |
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| 摘 要： | 采用气溶胶辅助化学气相沉积(AACVD)法在玻璃衬底上制备了Al掺杂ZnO(AZO)薄膜. 研究了Al掺杂(2at%~8at%)对ZnO薄膜结构及光电性能的影响. 利用XRD、SEM、EDAX、紫外可见分光光度计等手段对样品进行测试. 结果表明, 制备的所有AZO薄膜均具有纤锌矿结构, 不具有沿c轴方向的择优取向, XRD图谱中未观察出Al的相关分相. 在可见光范围内, AZO薄膜的平均透过率大于72%, 光学禁带宽度随Al掺杂量的增加而变窄. 同时根据四探针技术所得的数据得知: Al的掺杂导致薄膜方块电阻的变化, 随着Al掺杂量的增加, 方块电阻有明显变小的现象, 掺杂6at%Al的AZO薄膜具有最低方块电阻(18Ω/□).
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| 关 键 词： | 气溶胶 化学气相沉积法 Al:ZnO 透明导电薄膜 |
| 收稿时间： | 2010-08-19 |
| 修稿时间： | 2010-10-03 |
Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition |
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| QIN Xiu-Juan,HAN Si-Hui-Zhi,ZHAO Lin,ZUO Hua-Tong,SONG Shi-Tao.Fabrication of Transparent Conductive Al-doped ZnO Thin Films by Aerosol-assisted Chemical Vapour Deposition[J].Journal of Inorganic Materials,2011,26(6):607-612. |
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| Authors: | QIN Xiu-Juan HAN Si-Hui-Zhi ZHAO Lin ZUO Hua-Tong SONG Shi-Tao |
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| Affiliation: | (1. College of Environmental and Chemical Engineering, Yanshan University, Qinhuangdao 066004, China; 2. State Key Laboratory of Metastable Materials Science and Technology, Qinhuangdao 066004, China; 3. College of Physics and Chemistry, Hebei Normal University of Science and Technology, Qinhuangdao 066004, China) |
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| Abstract: | Al-doped ZnO thin films were prepared by aerosol-assisted chemical vapour deposition(AACVD) on glass substrates.The effect of Al content(2at%-8at%) on the structural,optical and electrical properties of Al-doped ZnO thin films was investigated in detail.The samples were tested by XRD,SEM,EDAX and UV-Vis spectrophotometer.The results indicate that the AZO films have a hexagonal(wurtzite) structure without preferen-tial orientation along c-axis,and however no Al related phases are observed.The average transmi... |
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| Keywords: | aerosol chemical vapour deposition Al-doped ZnO transparent conductive thin films |
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