Characterization of nanometer-sized Pt-dendrite structures fabricated on insulator Al2O3 substrate by electron-beam-induced deposition |
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Authors: | Guoqiang Xie Minghui Song Kazutaka Mitsuishi Kazuo Furuya |
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Affiliation: | (1) High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan;(2) Present address: Institute for Materials Research, Tohoku University, Sendai 980-8577, Japan |
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Abstract: | Nanometer-sized Pt-dendrite structures were fabricated on an insulator Al2O3 substrate using an electron-beam-induced deposition (EBID) process in a transmission electron microscope (TEM). The as-fabricated structures were characterized using conventional and high-resolution transmission electron microscopies (CTEM and HRTEM) and X-ray energy dispersive spectroscopy (EDS). The as-fabricated nanodendrites consisted of many nano-grains and amorphous state structures. The nanometer-sized grains were determined to be Pt crystals with face-centered cubic (fcc) structure. The formation of the nanodendrite structures are discussed to relate to a mechanism involving charge-up produced on surface of the substrate, movement of charges to and accumulation at the convex surface of the substrate and the tips of the deposits. |
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