一种新型单频激光干涉系统的研究

这种单频激光干涉系统采用共光路设计布局,通过偏振分束器以及1/4波长片等光学器件对干涉条纹进行空间移相,提取相位依次相差90°的三路干涉输出信号,进行比较放大,解决了常规单频激光干涉仪中的光强“零漂”问题。利用共模抑制技术,提高了干涉系统的测量稳定性和重复性。采用光程差放大技术,提高了干涉系统的分辨力。

Study on a Novel Single Frequency Laser Interferometer

The common optical path arrangement is adopted in the single frequency laser interferometer. The interference patterns are shifted spatially by using optical devices such as polarization beam splitter, and 1/4 wave plate. The interference output signals of three channels are extracted in phase differing 90 in order. Then the signals will be compared and amplified, thus "zero shift" of light intensity appeared in convenient single frequency laser interferometer is solved. The measurement stability and repetitiveness of the laser interferometer is improved by means of convenient mode inhibiting technique. The resolution of the laser interferometer is improved by using optical path difference doubling technique.