用扫描热显微镜研究材料表面微区热导分布

从集总参数模型出发，初步分析了热敏电阻型热探针的热传导机制和热物性测量机理，说明了扫描热探针的信号与样品表面温度、样品与探针间的热阻以及样品热导率等因素有关。在不同的工作条件下，可分别用以进行表面的温度分布和微区热导分布等热参数的测量。选定Ｓｉ－ＳｉＯ２标准样品，定性地讨论了表面形貌和样品热导率对测量结果的影响。把扫描热显微镜用于复合材料研究，得到的热像图提供了微区热导分布的信息。

Mapping local thermal conductivity by scanning thermal microscopy

From a thermal resistance network model, the tip-sample heat conductio n mechanism of a resistive thermal probe was analyzed. It was demonstrated that not only temperature distribution of the sample surface, but also thermal conduc tivity of the surface can be mapped in passive mode. In this work, the influen ce of topography and thermal conductivity was qualitatively analyzed using Si-S iO 2 sample, which was fabricated by microelectronic technique. Composite mater ials were investigated by combining both SThM and AFM.