| 基于菲涅尔衍射的圆孔直径测量 |
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| 引用本文： | 罗晓贺,惠梅. 基于菲涅尔衍射的圆孔直径测量[J]. 激光与红外, 2018, 48(3): 379-383 |
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| 作者姓名： | 罗晓贺 惠梅 |
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| 作者单位： | 北京理工大学光电学院,北京 100081 |
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| 基金项目： | 国家自然科学基金项目(No.61475018)资助 |
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| 摘 要： | 本文提出一种新的圆孔直径测量的方法。平行光照射下,圆孔直径和菲涅尔衍射光强分布中峰值轮廓直径存在一定的关系,根据该关系可以实现圆孔直径的测量。仿真和实验数据证明,该方法对于直径5~10 mm的圆孔可以达到亚微米级的测量精度。
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| 关 键 词： | 直径测量；菲涅尔衍射；峰值轮廓；边缘轮廓 |
Measurement of circular aperture diameter based on Fresnel diffraction |
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| LUO Xiao-he,HUI Mei. Measurement of circular aperture diameter based on Fresnel diffraction[J]. Laser & Infrared, 2018, 48(3): 379-383 |
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| Authors: | LUO Xiao-he HUI Mei |
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| Affiliation: | School of Optoelectronics,Beijing Institute of Technology,Beijing 100081,China |
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| Abstract: | A new diameter measurering method of circular aperture based on Fresnel diffraction is proposed.Under the irradiation of parallel light,there is a special relationship between the diameter of peak contour in Fresnel diffraction light intensity distribution and the diameter of circular aperture to be measured,and then the diameter of the circular aperture can be measured according to the relationship.Simulations and experiments show that the accuracy of this method can reach up to submicro order for the measurement of the circular apertures with diameter of 5~ 10 mm. |
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| Keywords: | diameter measurement Fresnel diffraction peak contour edge contour |
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