XeCl准分子激光器激励电路设计与优化

XeCl准分子激光器激励电路性能对激光器的输出特性有很大的影响,我实验室自制的XeCl准分子激光器创新性的采用了火花开关控制电路,对瞬时大电流进行控制,取得了满意的效果。针对激光器在实验过程中出现的问题,采用了过流保护、光耦合器隔离,电磁屏蔽等措施,优化了激光器的性能。实测数据表明采用的设计及改进措施使激光器激励电路工作稳定,激光器输出达到设计要求。

The design and optimization of the XeCl excimer laser''''s stimuli circuit

The stimuli circuit of the XeCl excimer laser has a great effect on the output characters of the laser. The spark gap switch was innovative and satisfied used to control the instant high current trigger signal of the XeCl excimer laser which was made by ourselves. To deal with the problems in the experiment, the current foldback, optical coupler insulation and electromagnetic shielding was used to optimize the laser's performance. The measurement data shows that the laser was working stably and the output character was reach to the design values by the improved method.