| 变包含角平面光栅单色仪的机械精度分析与测试 |
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| 引用本文： | 刘楷,薛松,卢启鹏,彭忠琦,吴坤,陈家华,王勇,巩志华. 变包含角平面光栅单色仪的机械精度分析与测试[J]. 核技术, 2009, 32(12) |
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| 作者姓名： | 刘楷 薛松 卢启鹏 彭忠琦 吴坤 陈家华 王勇 巩志华 |
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| 作者单位： | 中国科学院上海应用物理研究所,上海,201800;中国科学院研究生院,北京,100049;中国科学院上海应用物理研究所,上海,201800;中国科学院长春光学精密机械与物理研究所,长春,130033 |
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| 摘 要： | 在上海同步辐射装置软X射线谱学显微光束线站建设中,为达到变包含角平面光栅单色仪的能量分辨率要求,平面镜和光栅的转角重复精度必须要求达到0.43".为此我们建立了一套由光电自准直仪组成的测试系统,可以对平面镜和光栅机构进行测试.应用该系统测试了平面镜转角重复精度为0.166",光栅转角重复精度为0.149",分辨率达到0.03",满足了平面镜和光栅的转角重复精度和分辨率要求.此外,还测量了光栅切换机构的重复精度.
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| 关 键 词： | 变包含角平面光栅单色仪 光电自准直仪 转角重复精度 测量 |
Precision of a variable-included angle plane-grating monochromator (PGM) at SSRF |
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| LIU Kai,XUE Song,LU Qipeng,PENG Zhongqi,WU Kun,CHEN Jiahua,WANG Yong,GONG Zhihua. Precision of a variable-included angle plane-grating monochromator (PGM) at SSRF[J]. Nuclear Techniques, 2009, 32(12) |
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| Authors: | LIU Kai XUE Song LU Qipeng PENG Zhongqi WU Kun CHEN Jiahua WANG Yong GONG Zhihua |
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| Affiliation: | LIU Kai1,2 XUE Song1 LU Qipeng3 PENG Zhongqi3 WU Kun1,2 CHEN Jiahua1 WANG Yong1 GONG Zhihua1,2 1(Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China) 2(Graduate School of Chinese Academy of Sciences,Beijing 100049,China) 3(Changchun Institute of Optics,Fine Mechanics and Physics,Changchun 130033,China) |
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| Abstract: | In establishing the soft X-ray microscopy beamline at SSRF, angular repeatabilities of the plane mirror and the grating should be better than 0.43" to achieve the PGM's energy resolution. We designed an autocollimator system to measure the plane mirror and the grating. Test results show that angular repeatabilities of the plane mirror and the grating are measured at 0.166" and 0.149", respectively, and the resolution is 0.03", satisfying the technical requirements of the plane mirror and the grating for the angular repeatability and resolution. The angle repeatability of the grating switch is very good, too. |
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| Keywords: | Variable included angle plane-grating monochromator Photoelectric autocollimator Angle repeatability Measurement |
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