聚焦离子束致形变微纳加工研究进展

聚焦离子束技术（ focused ion beam，FIB）由于其高精度刻蚀、定点加工、实时成像等优势，常用于精密加工、TEM制样等领域。其工作机理通常为：刻蚀、淀积与成像。而基于FIB新的加工手段正在被探索和研究，其中就包括两种聚焦离子束致形变技术，分别为聚焦离子束应力引入致形变技术（ FIB?stress induced deformation，FIB?SID）和聚焦离子束物质再分布致形变技术（ FIB?material?redistribution induced deformation，FIB?MRD）。前者通过控制FIB辐照时离子注入与溅射之间的竞争关系实现悬臂梁的多角度弯曲，后者利用粒子与物质作用时的瑞利不稳定性构建纳米结构，在一定意义上扩充了聚焦离子束的应用范围。运用上述方法可以加工三维微纳螺旋，悬浮光滑纳米弦以及大规模阵列化纳米网孔等多样化微／纳功能构件，在微流控系统，太赫兹通信，光学天线等领域具有很强的应用前景。

Focused-ion-beam stress introducing technology for micro/nano-fabrications

Focused ion beam ( FIB) technology is often applied in the fields of ultra?fine fabrication and TEM sample?preparation, because of its advantages of ultra?fine etching, pointing process and real?time imaging. The fundamental methods include three aspects:etching, deposition and imaging. Here two novel fabrication methods based on FIB are presented, which are called FIB stress introduced deformation ( FIB?SID) and FIB material redistribution induced deformation ( FIB?MRD) . FIB?SID can precisely control the bending of structures by adjusting the relationship between ion implantation and sputtering during FIB scanning, and FIB?MRD will help build nano?structures utilizing Rayleigh instability during the interaction between ions and the target. By these methods, three dimensional micro/nano?helices, suspended and smooth ultra?thin nanowires as well as large scale nanopore arrays will be produced, which will have great potential in the fields such as micro?fluidic systems, Terahertz communication systems and optical antennas and so on.