| 金刚石薄膜的人工合成及其结合力的评估 |
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| 引用本文： | 王和照,张建军.金刚石薄膜的人工合成及其结合力的评估[J].微细加工技术,1994(2). |
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| 作者姓名： | 王和照 张建军 |
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| 作者单位： | 合肥工业大学 |
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| 基金项目： | 国家科委，工业科技司，新材料处资助项目 |
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| 摘 要： | 在硬质合金ＷＣ—Ｃｏ基体上，用热丝ＣＶＤ法，人工合成出金刚石薄膜。利用Ｘ衍射、激光拉曼光谱和扫描电镜对金刚石薄膜的结构进行了测定，结果是令人满意的。精确测量金刚石薄膜与基体间的结合力是很困难的。本文报导了金刚石薄膜涂层刀具的实际切削结果，并以此来评估该涂层与基体间的结合力。
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| 关 键 词： | 金刚石薄膜 WC—Co硬质合金 结合力 |
SYNTHESIS OF DIAMOND FILMS AND ASSESSMENT OF ADHESION |
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| Wang Hezhao.SYNTHESIS OF DIAMOND FILMS AND ASSESSMENT OF ADHESION[J].Microfabrication Technology,1994(2). |
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| Authors: | Wang Hezhao |
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| Abstract: | Diamond films have been synthesized by hot filament chemical vapordeposition(CVD)method on the WC Co substrate. The crystal structure ofdiamond films are analyzed by X-ray diffraction,laser Raman spectroscopyand scanning electron microscope. The results are satisfactory.It is very difficult to measure the adhesion between the substrate anddiamond film,The paper reports the actual cutting results of diamond-filmcoated tools and evaluates the adhesion between the substrate and coated filmby the results. |
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| Keywords: | diamond films hard alloy(WC Co) adhesion |
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