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Funktionalisierung der Oberfläche von Mikrostrukturen – Technologie und Anwendungen –. Functionalization of Microstructure Surfaces
Authors:Holger Reinicke,Oliver Lipold,Andreas Ohl,Wilfried Besch,Carsten Schr  der,Friedrich G  tz
Affiliation:Holger Reinicke,Oliver Lipold,Andreas Ohl,Wilfried Besch,Carsten Schröder,Friedrich Götz
Abstract:Microtechnology enables the dimensioning and fabrication of cost‐effective novel platforms for bio diagnostics. By the employment of plasma technologies for specific adjustment of surface characteristics, custom‐designed platforms are feasible. For a fast and reliable adjustment of product properties, special test chips have been developed. The conclusions for this development and first products are presented in this article.
Keywords:
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