Einsatz von Sauerstoffmesszellen beim Plasmanitrieren

In plasma nitriding, nitrocarburizing and carburizing in low pressure range 10 – 300 Pa, the gas potentiometric heatable oxygen probes have been technologically proven in a special design. These oxygen measurement cells are also suitable for the exactly measurement of oxygen partial pressure and of the quotient Q_H = p(H₂O)/p(H₂) in process gas for temperatures under 500 °C. The application has been carried out in different special combinations. In plasma nitriding and nitrocarburizing with a cell working‐temperature of 600 °C, an addition of methane up to 3 vol.‐% doesn’t have any influences on the cell voltage signal. The results show a principle suitability of two probes design with air and solid Cu/Cu₂O reference electrode. For the first time it has been managed to create the prerequisites with a newly developed measuring technique for a systematically examination of the influence of oxygen in plasma assisted processes and for low pressures.