基于原子力显微镜动力学模型的新型接触式扫描成像策略

面向高速高精度原子力显微镜的扫描成像策略是当今微纳米控制领域的热点问题。本文设计了一种新型的原子力显微镜接触式扫描算法，该算法充分挖掘了AFM压电陶瓷运动平台和微悬臂的动力学特性，通过对微悬臂偏转角进行跟踪控制以达到AFM高速高精度成像的目的。在动力学建模方面，本文提出了一种新颖的基于AFM压电陶瓷运动平台动态方程及微悬臂动态特性的复合动力学模型，该模型所构建的动力学系统可以通过压电陶瓷的输入电压对微悬臂偏转角进行精确控制。在此基础上，本文设计了一种新型的图像融合算法，利用AFM正反向扫描得到的两幅图像进行融合匹配，能够较好地消除AFM控制周期暂态特性所带来的图像畸变，提高AFM扫描成像准确度。本文所提出扫描成像策略的有效性在AFM实验平台上进行了验证，实验结果表明此成像策略能够在较高扫描频率下得到较为理想的成像效果。最后通过对比实验将这种方法与传统接触式扫描算法的成像效果进行了比较，结果表明对比传统方法本文所提出的AFM成像策略可以更好地保证成像速度和精确度。

Novel contact scanning strategy based on atomic force microscope dynamic model

Advanced AFM scanning strategy with high speed and accuracy plays a very important role in nano-control field. A novel contact scanning strategy is designed to enhance both the scanning speed and the imaging accuracy. The strategy in this paper fully explores the property of the dynamics in piezo-ceramic and cantilever, through which the torsion angle of cantilever is able to be controlled by adjusting the input voltage of piezo-ceramic. Moreover, a novel image data fusion algorithm is proposed, wherein both forward and backward scanning images are utilized to generate a new image, which can eliminate the distortion caused by transient property in control loops and improve the accuracy of scanning image. The performance of proposed strategy is tested on AFM platform, and the experiment result shows that this novel strategy is effective in high scanning frequency. Then the superior performance of the proposed strategy is validated through the experimental comparison with the traditional AFM scanning algorithm.