| 一体双驱对称式压电悬臂梁微驱动器 |
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| 引用本文： | 寻之宇,张卫平,周岁,欧彬.一体双驱对称式压电悬臂梁微驱动器[J].压电与声光,2018,40(5):656-660. |
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| 作者姓名： | 寻之宇 张卫平 周岁 欧彬 |
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| 作者单位： | （微米／纳米加工技术国家级重点实验室，薄膜与微细技术教育部重点实验室，上海市北斗导航与位置服务重点实验室，上海交通大学 电子信息与电气工程学院，微纳电子学系，上海 200240） |
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| 基金项目： | 预研基金资助项目（LZY2016215，6141A02022607，1620010701）；国家自然科学基金资助项目（61574093）；航空基金资助项目（2013ZC57003）；上海市平台基金资助项目（16DZ2290103） |
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| 摘 要： | 设计了一种一体化加工的双驱对称式压电悬臂梁微驱动器。对压电驱动器工作原理、压电驱动器在准静态工况与共振工况下的输出特性进行了理论分析，确定压电驱动器几何尺寸。介绍了压电驱动器的多层复合结构与一体双驱的实现方式。制作了压电驱动器样机，并通过有限元仿真分析与测试实验相结合的方式得到压电驱动器的阻抗特性与输出特性曲线。将压电驱动器运用在轮式机器人，验证了设计的可行性。
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| 关 键 词： | 压电驱动器 一体双驱 对称 微机电系统 悬臂梁式 |
Integrated Double drive Symmetrical Piezoelectric Cantilever Actuator |
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| XUN Zhiyu,ZHANG Weiping,ZHOU Sui,OU Bin.Integrated Double drive Symmetrical Piezoelectric Cantilever Actuator[J].Piezoelectrics & Acoustooptics,2018,40(5):656-660. |
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| Authors: | XUN Zhiyu ZHANG Weiping ZHOU Sui OU Bin |
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| Affiliation: | (National Key Lab. of Science and Technology on Nano/Micro Fabrication, Key Lab. for Thin Film andMicro Fabrication of the Ministry of Education, Shanghai Key Lab. of Navigation and Location Based Services, Dept. of Micro Nano Electronics, School of Electronic Informationand Electrical Engineering, Shanghai Jiaotong University, Shanghai 200240, China) |
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| Abstract: | An integrated dual drive symmetrical piezoelectric cantilever actuator is designed. The working principle of the piezoelectric actuator and the output characteristics of the piezoelectric actuator under quasi static conditions and resonant conditions are theoretically analyzed,and the geometry of the piezoelectric actuator is determined. The implementation of the multi layer composite structureof piezoelectric actuator and the realizing way of the integrated dual drive are introduced. The piezoelectric actuator prototype has been fabricated,the impedance characteristics and output characteristic curve of the piezoelectric actuator have been obtained through the combination of the finite element method simulation and experiments. The feasibility of the design is verified by applying piezoelectric actuators to the wheeled robots. |
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| Keywords: | piezoelectric actuators integrated double drive symmetry micro electro mechanical system cantilever |
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