基于PA85A的高精度动态压电陶瓷驱动电源设计

压电陶瓷作为原子力显微镜系统中的执行器件，能够快速跟踪测量样品的形貌。为提高压电陶瓷驱动器的定位精度与响应速度，根据电压控制型驱动电源的原理，以PA85A高压运放为核心器件，设计了一种高精度动态压电陶瓷驱动电源。分析了影响系统精度与动态性能的因素，采用相位补偿法，提高了系统的稳定性。实验结果表明，该电源具有精度高，动态响应快，稳定性强的特点，能有效用于原子力显微镜系统中。

Design of High precision Dynamic PZT Driving Power Based on PA85A

The piezoelectric ceramic,as an actuator in the atomic force microscope (AFM) system,can quickly trace the appearance of the measured sample.In order to improve the positioning accuracy and response speed of PZT actuators,according to the principle of the voltage controlled driving power,a high precision dynamic PZT driving power was designed based on the high voltage operational amplifier PA85A.The factors that affect the accuracy and dynamic performance of system were analyzed;the method for phase compensation was adopted to improve the stability of the system.The results show that this power has the features of high precision,fast dynamic response,high stability,which can be effectively applied to the AFM system.