| 模糊PID控制在纳米微动台系统中的应用 |
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| 引用本文： | 刘经宇,尹文生,朱煜.模糊PID控制在纳米微动台系统中的应用[J].控制工程,2011,18(2):254-257. |
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| 作者姓名： | 刘经宇 尹文生 朱煜 |
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| 作者单位： | 清华大学,精密仪器与机械学系摩擦学国家重点实验室,北京,100084 |
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| 基金项目： | 国家973重大基础研究计划资助项目，国家自然科学基金资助项目，中国博士后科学基金资助项目 |
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| 摘 要： | 针对在纳米级运动控制中,传统PID算法的参数配置在抑制系统运动超调、提高系统定位精度,以及保障系统稳定性等方面存在矛盾的问题,提出了将模糊自适应PID控制器应用于该系统的方案.并基于大量工程整定实验,给出了针对纳米量级控制特点的模糊集设置和模糊整定规则,选取了合理的PID参数论域取值.实验结果表明,所设计的模糊控制器通...
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| 关 键 词： | 模糊自适应PID控制 纳米级 微动台 |
Application of Adaptive Fuzzy PID Controller to Nano-scale Precision Motion Stage System |
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| LIU Jing-yu,YIN Wen-sheng,ZHU Yu.Application of Adaptive Fuzzy PID Controller to Nano-scale Precision Motion Stage System[J].Control Engineering of China,2011,18(2):254-257. |
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| Authors: | LIU Jing-yu YIN Wen-sheng ZHU Yu |
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| Affiliation: | LIU Jing-yu,YIN Wen-sheng,ZHU Yu(Department of Precision Instruments and Mechanology,Tsinghua University,Beijing 100084,China) |
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| Abstract: | According to the conflicts among overshoot restraint,positioning precision and stability of normal PID controller in nano-scale motion control,the adaptive fuzzy PID controller is applied to the nano-scale pricision motion system.Base on the characters of nano-scale motion control and a group of PID parameters from a mass of practical tuning,a set of fuzzy sets,fuzzy rules and fuzzy domain are proposed.The experiment result shows that the controller is effective to improve the dynamic performance and restra... |
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| Keywords: | adaptive fuzzy PID controll nano-scale precision motion stage |
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