石英谐振器不同谐振频率的力敏特性研究

圆形晶片厚度切变石英谐振器是常用的力敏谐振器。它有固定的设计谐波次数和谐振频率。文章介绍了以设计频率为三次谐波、５ＭＨｚ的ＡＴ－切型谐振器为力敏元件的力传感器在不同电路中分别振动在基频、３次谐波、５次谐波和７次谐波四个谐振频率，并对其力敏特性进行了实验研究。分析了用提高谐振频率的方法提高力灵敏度的可行性和局限性。根据石英谐振器振动在不同谐振频率时力灵敏度的温度特性，找到了温度变化时由力灵敏度温度系数造成的测量误差的消除方法，分析比较了这种方法和选取特定施力方位角消除上述误差的方法之间的差别和适用范围，并找到了在一定温度范围内可同时测量力（压力）和温度的石英传感器的设计原理。

The Force frequency Characterizations of Crystal Resonator Vibrating at Deferential Overtone

The circular crystal plate with thickness shear vibration is used as force sensing element,Its order of overtone and resonate frequency has been designed We succeed in experimenting that make the crystal resonator has been designed 3rd order overtone,5 0 MHz vibrafes at fundamental frequency,3rd order overtone frequency, 5th order overtone frequency, and 7th order overtone frequency, and measured the characteristics of that the frequency and sensitivity change when with the order changes This paper analyzes the feasibility and the limitativity of the method rising the sensitivity with making the resonator its order of overtone designed smaller vibrating at the higher order of overtone Based on the analyses feasibility for making the resonator vibrating at the deferential order of overtone,and the linearity between the force sensitivity and the temperature, a method for eliminating the measurement error caused by the temperature coefficient of force sensitivity is searched, a method for measuring force(or pressure) and temperature in same enrioromenting with one sensor is given This paper expounds the applicability of this method and the other method: selecting the special azimuth angle of applied force,at this angle the tempera ture coefficient of force sensitivity is zero