Development of specimen and test method for strength analysis of MEMS micromirror

Specimens and fracture test methods for strength analysis of MEMS micromirrors were proposed. Bending and combined loading tests were performed, and torsion strength was estimated from those results. Two-parameter Weibull distribution was used to evaluate the fracture stresses estimated from the FEM model. The resulting scale and shape parameters were 787 MPa and 7.77 for the bending test and 517 MPa and 5.28 for the combined loading test. There was a difference in strength between the results of the bending and combined loading tests. From the load factor analysis, it was found that both geometry and stress distribution have to be considered to estimate the strength of MEMS since flaws are non-uniformly distributed. It was also found that torsional strength can be estimated on the safe side using the results of the combined loading test.