首页 | 本学科首页   官方微博 | 高级检索  
     


Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty
Authors:BAWH Knarren  SJAG Cosijns  H Haitjema  PHJ Schellekens
Affiliation:Department of Mechanical Engineering, Section of Precision Engineering, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
Abstract:In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these interferometers. Measurement results are shown for both a range of View the MathML source m as well as a range of 300 mm. It is shown that a (selected) PM-fibre with an extinction ratio of 1:1650 and the use of an external reference allows realising a fibre-fed laser interferometer able to measure displacements with the same uncertainty as a laser interferometer system without fibre. Tests were performed with fibres ranging in length up to 50 m.
Keywords:Laser interferometry  Heterodyne laser interferometry  Optical fibres  Dimensional metrology  Nanometre uncertainty
本文献已被 ScienceDirect 等数据库收录!
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号