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Investigation on the traceability of three dimensional scanning electron microscope measurements based on the stereo-pair technique

Authors:	P Bariani L De Chiffre HN Hansen A Horsewell

Affiliation:	Department of Manufacturing Engineering and Management, Technical University of Denmark, 2800 Lyngby, Denmark

Abstract:

Keywords:	SEM Metrology Calibration Traceability Stereo-pair technique Stereoscopic SEM Surface reconstruction Uncertainty
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