| CLAM钢表面硬质薄膜的制备与性能研究 |
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| 引用本文： | 储汉奇,李合琴,都智,聂竹华.CLAM钢表面硬质薄膜的制备与性能研究[J].真空,2011,48(3). |
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| 作者姓名： | 储汉奇 李合琴 都智 聂竹华 |
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| 作者单位： | 合肥工业大学材料科学与工程学院,安徽合肥,230009 |
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| 基金项目： | 国家"973"项目，安徽省自然科学基金，安徽省高校自然科学基金 |
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| 摘 要： | 采用射频反应磁控溅射法在中国低活化马氏体(CLAM)不锈钢表面制备了单层Al2O3、SiC、W薄膜以及SiC/Al2O3、W/Al2O3双层膜.对所制备的薄膜进行了XRD结构分析、AFM表面形貌测试和显微硬度测试.结果表明:单层SiC薄膜表面出现了部分脱落,而SiC/AlO3双层膜表面完整光滑.W/Al2O3双层薄膜表面平整光滑,均方根粗糙度为4.28 Ha.W单层薄膜和W/Al2O3双层薄膜经氩气中800℃退火2 h后硬度最高,分别达到了34.4 GPa和31.3 GPa.
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| 关 键 词： | 射频反应磁控溅射 CLAM钢 A12O3薄膜 SiC薄膜 W薄膜 SiC/A12O3双层膜 W/A12O3双层膜 显微硬度 |
Preparation of hard films on the CLAM steel and their properties |
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| CHU Han-qi,LI He-qin,DU Zhi,NIE Zhu-hua.Preparation of hard films on the CLAM steel and their properties[J].Vacuum,2011,48(3). |
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| Authors: | CHU Han-qi LI He-qin DU Zhi NIE Zhu-hua |
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| Affiliation: | CHU Han-qi,LI He-qin,DU Zhi,NIE Zhu-hua(School of Materials Science and Engineering,Hefei University of Technology,Hefei 230009,China) |
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| Abstract: | A12O3,SiC,W thin films and SiC/A12O3,W/A12O3 bilayer films were prepared by reactive radio-frequency(RF) magnetron sputtering on China low activation martensitic(CLAM) steel.The phase composition,surface morphology and micro hardness of the films were detected by X ray diffractometer(XRD),atomic force microscopy(AFM) and micro hardness meter.The results showed that,the SiC thin film peeled off to some extent,while the SiC/A12O3 bilayer films are very tight and smooth.The W/A12O3 bilayer films are also very ... |
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| Keywords: | reactive RF magnetron sputtering CLAM steel A12O3 thin film SiC thin film W thin film SiC/A12O3 bilayer film W/A12O3 bilayer film micro hardness |
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