| 脉冲调制射频容性耦合SiH/C2H4/Ar放电的发射光谱诊断 |
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| 引用本文： | 张娇,张鹏云. 脉冲调制射频容性耦合SiH/C2H4/Ar放电的发射光谱诊断[J]. 真空, 2011, 48(3) |
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| 作者姓名： | 张娇 张鹏云 |
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| 作者单位： | 大连理工大学三束材料表面改性教育部重点实验室,辽宁大连,116024 |
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| 基金项目： | 国家自然科学基金，中央高校基本科研业务费专项资金 |
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| 摘 要： | 本文采用发射光谱法诊断了低气压下氩气(Ar)、硅烷(SiH4)及乙烯(C2H4)混合气体(SiH4/C2H4/Ar)脉冲调制射频放电等离子体特性,利用了Ar发射光谱中的五条谱线通过Boltzmann斜率法计算了电子激发温度,研究了占空比、调制频率、功率及气压等对电子激发温度和谱线相对强度的影响.
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| 关 键 词： | 脉冲调制 发射光谱诊断 电子激发温度 |
Optical emission spectrometry diagnosis of pulse-modulated RF capacitive coupling discharge in SiH4/C2H4/Ar |
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| ZHANG Jiao,ZHANG Peng-yun. Optical emission spectrometry diagnosis of pulse-modulated RF capacitive coupling discharge in SiH4/C2H4/Ar[J]. Vacuum(China), 2011, 48(3) |
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| Authors: | ZHANG Jiao ZHANG Peng-yun |
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| Affiliation: | ZHANG Jiao,ZHANG Peng-yun(Key Laboratory of Materials Modification by Laser,Ion and Electron Beam of Ministry of Education,Dalian Universtity of Technolgy,Dalian 116024,China) |
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| Abstract: | Characteristics of pulse-modulated capacitive coupling plasmas in SiH4/C2H4/Ar gas mixture were diagnosed by optical emission spectroscopy.The electron excitation temperature of plasmas was calculated with the five Ar emission spectral lines by Boltzmann slope method.Then,the dependence of the excitation temperature and relative emission intensity on the discharge power,duty cycle,modulation frequency and gas pressure were presented. |
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| Keywords: | pulse-modulation optical emission spectrometry electron excitation temperature |
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