| 一种面向化学机械抛光终点检测系统的信号处理方法 |
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| 引用本文： | 徐驰,郭东明,金洙吉,康仁科.一种面向化学机械抛光终点检测系统的信号处理方法[J].半导体学报,2010,31(12):126002-5. |
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| 作者姓名： | 徐驰 郭东明 金洙吉 康仁科 |
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| 基金项目： | Project supported by the Major Program of National Natural Science Foundation of China （No. 50390061） and the National Science and Technology Major Project, China （No. 2009ZX02011）. |
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| 摘 要： | 提出了一种针对基于摩擦的化学机械抛光（Chemical Mechanical Polishing，CMP）终点检测系统的信号处理方法。该信号处理方法采用小波阈值去噪的方法去除包含在原始测量信号中的噪声；从去噪后的信号中提取卡尔曼滤波新息作为特征信号；根据CMP过程中卡尔曼滤波新息的特征来判断何时达到CMP终点。应用该信号处理方法，进行了铜CMP过程的终点检测试验。试验结果表明，该信号处理方法可以判断出铜CMP过程的终点。
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| 关 键 词： | 信号处理方法 检测系统 CMP 摩擦 卡尔曼滤波 化学机械抛光 端点检测 去噪方法 |
| 收稿时间： | 8/9/2010 10:02:13 AM |
| 修稿时间： | 9/30/2010 8:29:13 AM |
A signal processing method for the friction-based endpoint detection system of a CMP process |
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| Xu Chi,Guo Dongming,Jin Zhuji and Kang Renke.A signal processing method for the friction-based endpoint detection system of a CMP process[J].Chinese Journal of Semiconductors,2010,31(12):126002-5. |
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| Authors: | Xu Chi Guo Dongming Jin Zhuji and Kang Renke |
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| Affiliation: | Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China;Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian 116024, China |
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| Abstract: | A signal processing method for the friction-based endpoint detection system of a chemical mechanical polishing (CMP) process is presented. The signal process method uses the wavelet threshold denoising method to reduce the noise contained in the measured original signal, extracts the Kalman filter innovation from the denoised signal as the feature signal, and judges the CMP endpoint based on the feature of the Kalman filter innovation sequence during the CMP process. Applying the signal processing method, the endpoint detection experiments of the Cu CMP process were carried out. The results show that the signal processing method can judge the endpoint of the Cu CMP process. |
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| Keywords: | CMP endpoint detection signal processing |
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