Structural, optical and electrical properties of indium tin oxide thin films prepared by spray pyrolysis |
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Authors: | E. Benamar M. Rami C. Messaoudi D. Sayah A. Ennaoui |
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Affiliation: | aDéptartmento de Physique, Laboratoire de Physique des Matériaux, Faculté des Sciences, BP 1014, Ave Inb Battouta, Rabat, Morocco;bHahn-Meitner-Institut, Department of Physical Chemistry, Glienicker Straße 100 D-14109 Berlin, Germany |
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Abstract: | Spray pyrolysis process has been used to deposit highly transparent and conducting films of tin-doped indium oxide onto glass substrates. The electrical, structural and optical properties have been investigated as a function of various deposition parameters namely dopant concentrations, temperature and nature of substrate. The morphology of the surface as a function of the substrate temperature has been studied using atomic force microscopy. XRD has shown that deposited films are polycrystalline without second phases and have a preferred orientation (4 0 0). Indium tin oxide layers with low resistivity values around 4×10−5 Ω cm and transmission coefficients in the visible and near-infrared range of about 85–90% have been easily obtained. |
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Keywords: | Indian tin oxide Spray pyrolysis Transparent coatings |
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