| 基于谐振式MEMS传感器的仪表开发关键技术 |
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| 引用本文： | 焦海龙,陈德勇,王军波,李玉欣,李浩. 基于谐振式MEMS传感器的仪表开发关键技术[J]. 仪表技术与传感器, 2012, 0(1): 26-28 |
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| 作者姓名： | 焦海龙 陈德勇 王军波 李玉欣 李浩 |
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| 作者单位： | 1. 中国科学院电子学研究所传感技术联合国家重点实验室,北京100190;中国科学院研究生院,北京100190
2. 中国科学院电子学研究所传感技术联合国家重点实验室,北京,100190 |
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| 基金项目： | 国家863计划项目资助(2007AA4Z318) |
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| 摘 要： | 针对基于谐振式MEMS传感器开发数字智能仪器仪表的高精度、快响应频率测量技术展开研究。以一谐振式MEMS气压传感器为开发样件,其差分输出是两路40～70 kHz之间的正弦频率信号。对传统的频率测量方法进行阐述分析,提出一种新的结合传统测频方法各自优点的频率检测方法。设计实现相关软、硬件,搭建测试系统,实验结果表明该测频方案针对40～70 kHz的频率信号误差小于±0.02 Hz,响应时间为1 s以内。
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| 关 键 词： | MEMS 谐振式传感器 单片机 高精度 快响应 频率检测 |
Key Technologies of Instrument Development Based on MEMS Resonant Sensor |
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| JIAO Hai-long , CHEN De-yong , WANG Jun-bo , LI Yu-xin , LI Hao. Key Technologies of Instrument Development Based on MEMS Resonant Sensor[J]. Instrument Technique and Sensor, 2012, 0(1): 26-28 |
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| Authors: | JIAO Hai-long CHEN De-yong WANG Jun-bo LI Yu-xin LI Hao |
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| Affiliation: | 1,2(1.State Key Laboratory of Transducer Technology,Institute of Electronics,Chinese Academy of Sciences,Beijing 100190, China;2.Graduate University,Chinese Academy of Sciences,Beijing 100190,China) |
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| Abstract: | A study of high precision,fast response frequency measurement was presented,which was crucial for MEMS-based resonant sensor to develop digital intelligent instrument.Took a MEMS-based resonant pressure sensor as study sample,its differential outputs were two sinusoidal frequency signals whose value was from 40 kHz to 70 kHz.The traditional frequency measuring methods were described and analyzed,and a novel method with the advantages of traditional methods was proposed for frequency measuring.Hardware and software system were designed and implemented,test system was set up,and the experimental results show that the frequency measuring system’s error is less than ± 0.02 Hz and its response time is no more than 1 s for 40kHz to 70 kHz frequency signals. |
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| Keywords: | MEMS resonant sensor MCU high-precision fast response frequency measure |
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