基于碳膜的柔性神经微电极阵列加工

为了实现长期安全有效的神经电刺激，避免电极腐蚀情况，提出了一种基于热解光刻胶形成碳膜作为导电材料的柔性视网膜神经微电极阵列．首先，通过高温热解图形化的光刻胶形成导电碳膜，然后利用光敏性聚酰亚胺（Durimide 7510）作为基底材料，通过光刻结合转膜、键合和牺牲层腐蚀技术，实现了具有柔性特征的碳膜神经微电极阵列．实验结果显示这种碳膜电极的电荷存储能力达到6．625mC／cm2．是金电极的12．4倍，显示了良好的电化学稳定性和电荷注入能力，有利于其长期植入和安全有效地工作，可应用于新一代人工视网膜系统的构建．

Fabrication of Carbon Film-Based Flexible Neural Microelectrode Array

To achieve long-term safe and effective stimulation and to avoid erosion of electrodes, a novel flexible retinal stimulation microelectrode array was developed using pyrolyzed photoresist carbon film as a conducting material in this paper. Firstly, the patterned photoresists were pyrolyzed to produce conduc- ting carbon fihns at high temperature. Then, a photosensitive polyimide （Durimide 7510） was used as the substrate material. By patterning with photolithography techniques, sequentially transferring the carbon film, bonding two insulting layers and etching the sacrifice layer, the flexible carbon film microelec- trode arrays were successfully fabricated. Experimental results show that the charge storage capacity of the carbon film microelectrodes is 6. 625 mC/cm2, which is about 12.4 times greater than that of the gold microelectrodes, indicating that the carbon film microelectrodes have a good electrochemical stability and a large charge injection capability, which is beneficial to their long-term implantation and safe work. This flexible carbon film microelectrode array can he a promising candidate for retinal prosthesis.