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电子封装与焊接质量的超声显微检测技术
引用本文:刘中柱,徐春广,郭祥辉,赵新玉,杨柳. 电子封装与焊接质量的超声显微检测技术[J]. 电子与封装, 2012, 12(3): 1-5,24
作者姓名:刘中柱  徐春广  郭祥辉  赵新玉  杨柳
作者单位:1. 北京理工大学先进加工技术国防重点学科实验室,北京100081/中北大学机械工程与自动化学院,太原030051
2. 北京理工大学先进加工技术国防重点学科实验室,北京,100081
基金项目:国家自然科学基金(50975028); 高等学校学科创新引智计划项目资助(B08043)
摘    要:电子封装内部缺陷的尺度微小,引脚焊接的间距也很小,传统检测方法很难对其进行检测。超声显微技术利用聚焦高频超声来进行检测,能对试样表面、亚表面及其内部一定深度内的细微结构进行显微成像,可用来检测电子封装和评估焊接质量。文章采用高速数据采集卡、高频超声聚焦换能器、宽频脉冲收发仪与高精度运动系统,研发了一套超声显微镜系统。该系统具有较高的精度,功能基本完善,造价相对低廉,能进行全时域波形采集与存储。实验结果表明该系统能检测出电子封装内的微细缺陷,可用来评估引脚的焊接质量。

关 键 词:超声显微镜  全波采集  电子封装  无损检测

Scanning Acoustic Microscopy Testing Technology for Electronic Package and Welding Quality
LIU Zhong-zhu,XU Chun-guang,GUO Xiang-hui,ZHAO Xin-yu,YANG Liu. Scanning Acoustic Microscopy Testing Technology for Electronic Package and Welding Quality[J]. Electronics & Packaging, 2012, 12(3): 1-5,24
Authors:LIU Zhong-zhu  XU Chun-guang  GUO Xiang-hui  ZHAO Xin-yu  YANG Liu
Affiliation:1.Key laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology,Beijing 100081,China; 2.School of Mechanical Engineering and Automation,North University of China, Taiyuan 030051,China)
Abstract:The size of defects in electronic package's is micro scale,also the space between welding pins is crowd,so that it difficult to inspect it with traditional testing method.Scanning acoustic microscopy(SAM)with high-frequency focused ultrasound can be used to get deep insight on the micro structure.In this paper,an complete SAM system has been developed including a high-speed data acquisition card,high-frequency ultrasonic focus transducers,a broad band pulse transmitter/receiver,and a high-precision motion system.so this SAM system has some features like high accuracy,high-performance and low cost.Also several advanced non-destructive techniques are accomplished such as full-wave sampling,storing,and dynamical imaging.The inspection results on electronic packages proved that this SAM system can be a useful tool to find electronic package's inner micro defects and evaluate the welding quality of the pins.
Keywords:scanning acoustic microscopy  electronic package  full-wave acquisition  non-destructive testing
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