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Ion-Beam Deposition of Thin AlN Films on Al2O3 Substrate |
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| Authors: | Lunin L S Devitskii O V Sysoev I A Pashchenko A S Kas’yanov I V Nikulin D A Irkha V A |
| Affiliation: | 1.Federal Research Center, Southern Scientific Center of the Russian Academy of Sciences, 344006, Rostov-on-Don, Russia ;2.Platov South Russian State Polytechnic University, 346428, Novocherkassk, Rostov oblast, Russia ;3.North Caucasus Federal University, 355009, Stavropol, Russia ; |
| Abstract: | Technical Physics Letters - Thin aluminum nitride (AlN) films on sapphire (Al2O3) substrates were grown by means of ion-beam deposition (IBD) and studied by methods of scanning electron microscopy,... |
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