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Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition |
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| Authors: | Tarala V. A. Altakhov A. S. Ambartsumov M. G. Martens V. Ya. |
| Affiliation: | 1.North Caucasus Federal University, Stavropol, 355009, Russia ; |
| Abstract: | Technical Physics Letters - The possibility of growing oriented AlN films on Al2O3 substrates at temperatures below 300°C by plasma-enhanced atomic layer deposition was examined. The samples... |
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