嵌入式光栅多层结构锥形衍射的严格耦合波理论研究 |
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引用本文: | 杨亮,李艳秋,马旭,盛乃援. 嵌入式光栅多层结构锥形衍射的严格耦合波理论研究[J]. 红外与激光工程, 2014, 43(6): 1899-1904 |
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作者姓名: | 杨亮 李艳秋 马旭 盛乃援 |
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作者单位: | 1.北京理工大学光电学院,北京 100081 |
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基金项目: | 国家自然科学基金重点项目;国家中长期科技重大专项(F050809/60938003) |
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摘 要: | 基于严格耦合波分析理论,将嵌入式光栅多层结构平面衍射的理论模型扩展至锥形衍射的情况,可以模拟具有任意波长、偏振态、方位角和入射角的平面波入射该多层结构后形成的衍射。在此基础上,研究了微机械声光传感器锥形衍射中+1 级光衍射效率的收敛性。仿真表明:TM(Transverse Magnetic)偏振光入射且光栅周期为4 m 时,当谐波数M(2n+1)分别为67、69、71 时,+1级光衍射效率分别为28.86%、28.84%、28.86%,收敛性较好。另外,优化了微机械声光传感器的位移灵敏度,当入射角为22、方位角为10、光栅周期为1 m 时,与周期为4 m 的+1 级衍射光相比,TE、TM 偏振光入射时0、+1 级衍射光的位移灵敏度均提高一倍,可以准确地监测该传感器中声压或驱动电压引起的金属膜的位移。
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关 键 词: | 严格耦合波法 亚波长光栅 多层结构 锥形衍射 |
收稿时间: | 2013-10-14 |
Rigorous coupled wave analysis of grating-embedded multilayer structure conical diffraction |
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Affiliation: | 1.School of Optoelectronics,Beijing Institute of Technology,Beijing 100081,China |
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Abstract: | Based on rigorous coupled wave analysis, the models for grating-embedded multilayer structure planar diffraction were generalized to the case of conical diffraction. The proposed method can be used to calculate the light diffracted from the grating-embedded multilayer structure with arbitrary wavelength, polarization, azimuthal angle and incident angle. For the micromachined optoacoustic sensor, the convergence performance of the diffraction efficiencies of the reflected +1st order in conical diffraction was investigated. The simulations show that using a 4m grating period and TM (Transverse Magnetic) polarization, when the numbers of harmonics M(2n+1) are 67, 69 and 71, the diffraction efficiencies of the +1st order are 28.86%, 28.84% and 28.86%, respectively. Then the displacement sensitivity of the micromachined optoacoustic sensor was optimized. When the incident angle, the azimuthal angle and the grating period are 22, 10and 1 m, respectively, compared with the +1st diffracted orders of 4 m grating period, the displacement sensitivity of the 0th and +1st orders under TE and TM polarization was nearly doubled. It can be used to accurately monitor the metal membrane displacement induced by the acoustic pressure or electrostatic actuation voltage. |
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