| PSTM 用于Al_2O_3光波导薄膜的研究 |
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| 引用本文： | 潘石,王继松,吴世法,简国树.PSTM 用于Al_2O_3光波导薄膜的研究[J].光电子．激光,2001,12(4):351-353. |
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| 作者姓名： | 潘石 王继松 吴世法 简国树 |
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| 作者单位： | 大连理工大学物理系，大连116023 |
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| 基金项目： | 国家自然科学基金资助项目(39670208) |
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| 摘 要： | 利用光子扫描隧道显微镜（PSTM）检测研究Al2O3光波导薄膜及其制备工艺，分析了不同温度条件下采用离子束增强沉积工艺制备的Al2O3光波导薄膜PSTM图像，结果表明，适当的增加基片的温度可以减少散射损耗 ，改善Al2O3光波导薄膜的性能。
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| 关 键 词： | 光子扫描隧道显微镜 光波导薄膜 氧化铝 |
| 文章编号： | 1005-0086(2001)04-0351-03 |
| 修稿时间： | 2000年9月13日 |
Study on Al_2O_3 Wave-guide Film with PSTM |
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| PAN Shi,WANG Ji song,WU Shi f,JIAN Guo shu.Study on Al_2O_3 Wave-guide Film with PSTM[J].Journal of Optoelectronics·laser,2001,12(4):351-353. |
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| Authors: | PAN Shi WANG Ji song WU Shi f JIAN Guo shu |
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| Abstract: | A method for measuring Al2O3 optical wave-guide film and studyingits fabrication technique was proposed. The photon scanning tunneling microscope (PSTM) images of Al2O3 optical wave-guide film made by ion-beam-enhanced-deposition (IBED) technique at different temperature were analyzed.The results show that by properly increasing the temperature of the substrate,the scattering loss was decreased and the property of optical A12O3 wave-guide was mproved. |
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| Keywords: | photon scaning tunneling microscope (PSTM) Al 2O 3 optical wave guide film scattering loss |
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