| RF MEMS器件驱动机制理论与分析 |
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| 引用本文： | 南敬昌,刘元安,黎淑兰. RF MEMS器件驱动机制理论与分析[J]. 微电子学, 2006, 36(4): 416-419 |
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| 作者姓名： | 南敬昌 刘元安 黎淑兰 |
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| 作者单位： | 1. 北京邮电大学,电信工程学院,北京,100876;辽宁工程技术大学,电子与信息工程系,辽宁,葫芦岛,125105
2. 北京邮电大学,电信工程学院,北京,100876 |
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| 摘 要： | 介绍了驱动机制在RF MEMS器件制作中所处的地位。以悬梁类型的RF MEMS开关为例,介绍了RF MEMS器件的各种驱动方式,给出了其原理结构图;详细分析了静电驱动、压电驱动、热驱动和磁驱动的原理。对各种驱动机制进行了比较和分析,得出应根据不同场合和不同参数要求,选择不同驱动机制的驱动器。
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| 关 键 词： | RF MEMS 静电驱动 压电驱动 热驱动 磁驱动 |
| 文章编号： | 1004-3365（2006）04-0416-04 |
| 收稿时间： | 2005-11-10 |
| 修稿时间： | 2005-11-102006-02-13 |
Theory and Analysis of Actuating Mechanism for RF MEMS Devices |
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| NAN Jing-chang,LIU Yuan-an,LI Shu-lan. Theory and Analysis of Actuating Mechanism for RF MEMS Devices[J]. Microelectronics, 2006, 36(4): 416-419 |
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| Authors: | NAN Jing-chang LIU Yuan-an LI Shu-lan |
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| Affiliation: | 1. College of Telecommunication Engineering, Beijing University of Posts andTelecommunications, Beijing 100876, P. R. Chinas 2. Dept. of Electronic and Information Engineering, Liaoning Technical University, Huludao, Liaoning 125105, P.R. China |
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| Abstract: | The important role of actuating mechanism in fabrication of RF MEMS devices is explained.Based on RF MEMS switch with cantilevers,different modes of actuation for RF MEMS devices are described.Analyses on theories of electrostatic,piezoelectric,electrothermal and electromagnetic actuations and a comparison between these mechanisms are made.It is concluded that,depending on different applications and requirements,actuators with different actuating mechanisms should be used. |
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| Keywords: | RF MEMS Electrostatic actuation Piezoelectric actuation Electrothermal actuation Electromagnetic actuation |
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