Young's modulus characterization of low-k films of nanoporous Black Diamond~(TM) by surface acoustic waves |
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作者姓名: | 单兴锰 肖夏 刘亚亮 |
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作者单位: | School of Electronic and Information Engineering, Tianjin University, Tianjin 300072, China |
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基金项目: | Project supported by the National Natural Science Fotmdation of China(No.60876072); the New Century Excellent Talents in University China(No.NCET-08-0389). |
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摘 要: |
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关 键 词: | 表面声波 杨氏模量 纳米多孔 超薄膜 钻石 TM Si(100) 表征 |
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