Effect of the cooling rate on the properties of a Si-10% Al alloy for magnetron sputterint targets |
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| Authors: | I G Kolesnikova V I Serba Yu V Kuz’mich B M Freidin V G Korotkov S I Voronchuk |
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| Affiliation: | (1) Institute of Chemistry and Technology of Rare Elements and Mineral Raw Materials, Kola Research Center, Russian Academy of Sciences, ul. Fersmana 14, Apatity, Murmansk oblast, 184200, Russia |
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| Abstract: | The effect of the cooling rate on the micromechanical properties and residual thermal stresses in Si-10% Al alloy targets has been studied. To reach the required quality, these targets should be cooled at rates of 10–40 K/s. In this case, the alloy has high strength properties, the level of residual stresses in a target is minimal, and the stress distribution is most uniform. |
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