| Design and Fabrication of Polymer Arrayed Waveguide Grating |
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| 作者姓名： | ZHANG Da ming WANG Fei ZHANG Zhen guo ZHAO Yu YI Mao bin LIU Shi yong |
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| 作者单位： | State Key Laboratory of Integrated Optoelectronics，Jilin University，Changchun 130023，P.R.China |
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| 基金项目： | ThisworkissupportedbytheScience&TechnologyCouncilofChina(theprojectnumbersare 2 0 01AA31 2 1 60andtheTG2 0 0 0 036602)andNationalNaturalScienceFoundationofChina (60 1 770 2 2 ) |
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| 摘 要： | 1 IntroductionTheArrayedWaveguideGrating(AWG)multi plexerisanimportantopticaldeviceforWavelengthDivisionMultiplexing (WDM )inopticaltelecom municationsystems1～ 5] .Thisdevicecanoffersomebasicfunctionsincludingmultiplexing/demultiplex ing ,add/dropmultiplexingandN×Ninterconnec tion.Also,itpossessessomeadvantages,suchasnarrowerwavelengthspacing ,moresignalchannels,lowercrosstalkandsmootherpassbands.AWGmul tiplexers6～1 0 ] havebeenfabricatedusingsilicas,InPandpolymers.Amongthem ,apo…
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Design and Fabrication of Polymer Arrayed Waveguide Grating |
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| ZHANG Da ming,WANG Fei,ZHANG Zhen guo,ZHAO Yu,YI Mao bin,LIU Shi yong.Design and Fabrication of Polymer Arrayed Waveguide Grating[J].The Journal of China Universities of Posts and Telecommunications,2003,10(2). |
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| Authors: | ZHANG Da-ming WANG Fei ZHANG Zhen-guo ZHAO Yu YI Mao-Bin LIU Shi-yong |
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| Abstract: | In this paper, based on the principle of Arrayed Waveguide Grating (AWG) theory, some important parameters are optimized for polymer AWG around the central wavelength of 1.55μm with the wavelength spacing of 1.6nm. Then, a 9×9 polymer AWG is designed and the fabricating process are described. The cladding material is poly-methyl-methacrylate-co-glyciclyl methacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. In order to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen, an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabrication process. The measuring results indicate that the fabricated optical waveguide achieves single-mode transmission. |
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| Keywords: | arrayed waveguide grating polymer wavelength division multiplexing |
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