| Mn掺杂Ga_2O_3薄膜的结构及光吸收性能研究 |
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| 引用本文： | 胡帆,晁明举,梁二军,姜雅丽. Mn掺杂Ga_2O_3薄膜的结构及光吸收性能研究[J]. 材料导报, 2009, 23(16) |
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| 作者姓名： | 胡帆 晁明举 梁二军 姜雅丽 |
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| 作者单位： | 郑州大学物理工程学院材料物理教育部重点实验室,郑州,450052 |
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| 基金项目： | 河南省教育厅自然科学研究计划 |
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| 摘 要： | 采用磁控溅射法在Si(111)和玻璃衬底上制备出不同Mn掺杂含量的Ga2O3薄膜,使用扫描电子显微镜、电子能谱仪、X射线衍射仪、紫外-可见分光光度计等对Mn掺杂Ga2O3薄膜的表面形貌、结晶特性和光吸收性能进行了研究.结果表明,适量掺杂Mn可抑制薄膜的晶格膨胀,促进Ga2O3薄膜晶粒的定向生长,得到尺寸分布较均匀的多面体晶粒.Mn掺杂使Ga2O3价带项向带隙延伸,光学带隙变窄,吸收边红移,近紫外区吸收增强.
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| 关 键 词： | Ga2O3薄膜 Mn掺杂 磁控溅射 微观结构 光吸收性能 |
Investigation on Microstructure and Photo-absorption Property of Mn-doped Ga_2O_3 Thin Films |
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| HU Fan,CHAO Mingju,LIANG Erjun,JIANG Yali. Investigation on Microstructure and Photo-absorption Property of Mn-doped Ga_2O_3 Thin Films[J]. Materials Review, 2009, 23(16) |
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| Authors: | HU Fan CHAO Mingju LIANG Erjun JIANG Yali |
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| Affiliation: | HU Fan,CHAO Mingju,LIANG Erjun,JIANG Yali(Key Laboratory of Material Physics of Ministry of Education,School of Physical Engineering,Zhengzhou University,Zhengzhou 450052) |
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| Abstract: | Mn-doped Ga2O3 thin films with different contents Mn-doping are deposited on Si(111) and glass substrates by magnetron sputtering method.The surface morphology,microstructure and photo-absorption property of the deposited films are analyzed by SEM,EDS,XRD and UV-vis spectrophotometer.The results indicate that a proper amount of Mn-doping to the Ga2O3 thin films can inhibit the grain from expanding,induce the crystallization directional growing and then form polyhedral grain.Moreover,Mn-doping to the Ga2O3 t... |
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| Keywords: | Ga_2O_3 thin film Mn-doping magnetron sputtering microstructure photo-absorption property |
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