| Measurement Method of the Thickness Uniformity for Polymer Films |
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| 作者姓名： | YANGHong-liang RENQuan FANYun-zheng |
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| 作者单位： | [1]Dept.ofOptics [2]SchoolofPhys.andMicroelectron.;ShandongUniveristy.Jinan250100,CHN |
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| 摘 要： | Several methods for investigating the thickness uniformity of polymer thin films are presented as well their measurement principles.A comparison of these experimental methods is given.The cylindrical lightwave feflection method is found to can obtain the thickness distribution along a certain direction.It is simple and suitable method to evaluate the film thickness uniformity.
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| 关 键 词： | 高分子膜 厚度测量 测量方法 厚度一致性 |
| 收稿时间： | 2002/11/8 |
Measurement Method of the Thickness Uniformity for Polymer Films |
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| YANGHong-liang RENQuan FANYun-zheng.Measurement Method of the Thickness Uniformity for Polymer Films[J].Semiconductor Photonics and Technology,2003,9(2):128-132. |
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| Authors: | YANG Hong-liang REN Quan FAN Yun-zheng |
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| Abstract: | Several methods for investigating the thickness uniformity of polymer thin films are presented as well as their measurement principles. A comparison of these experimental methods is given.The cylindrical lightwave reflection method is found to can obtain the thickness distribution along a certain direction.It is a simple and suitable method to evaluate the film thickness uniformity. |
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| Keywords: | Polymer complex thin films Thickness uniformity Measurement method |
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