| Hg1—xCdxTe液相外延薄膜的晶体质量分析 |
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| 引用本文： | 朱基千,褚君浩.Hg1—xCdxTe液相外延薄膜的晶体质量分析[J].功能材料与器件学报,1997,3(2):103-108. |
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| 作者姓名： | 朱基千 褚君浩 |
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| 作者单位： | [1]华东理工大学无机材料系 [2]中国科学院上海技术物理研究所红外物理国家实验室 |
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| 摘 要： | 本文用Ｘ－射线双晶遥摆曲线，分析了Ｈｇ１－ｘＣｄｘＴｅ外延薄膜的晶体质量。结果表明，用垂直浸渍液相外延方法生长的Ｈｇ１－ｘＣｄｘＴｅ薄膜，结构均匀性好，晶体质量高，Ｈｇ１－ｘＣｄｘＴｅ外延薄膜表面层的晶体质量，优于其界面层；同时，Ｈｇ１－ｘＣｄｘＴｅ外延薄膜表面层的位错密度，可通过Ｘ－射线双晶遥摆曲线的半峰算得到。
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| 关 键 词： | 晶体质量 液相外延 薄膜 三元系 红外探测器 |
STUDY ON THE CRYSTAL PERFECTION OF LPE Hg 1-x Cd xTe FILMS |
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| ZHU Jiqian ,CHU Junhao ,LI Biao ,CHEN Xinqiang ,CAO Juying and CHENG Jijian.STUDY ON THE CRYSTAL PERFECTION OF LPE Hg 1-x Cd xTe FILMS[J].Journal of Functional Materials and Devices,1997,3(2):103-108. |
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| Authors: | ZHU Jiqian CHU Junhao LI Biao CHEN Xinqiang CAO Juying and CHENG Jijian |
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| Affiliation: | ZHU Jiqian 1,2,CHU Junhao 2,LI Biao 2,CHEN Xinqiang 2,CAO Juying 2 and CHENG Jijian 1 |
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| Abstract: | The crystal perfection of thick Hg 1-x Cd xTe layers grown by the vertical dipping LPE on CdZnTe substrates has been studied by the X ray double crystal rocking curve (DCRC) analysis The structural quality of Hg 1-x Cd xTe top epilayers is better than that of the region near interface between the substrate and epilayer The full width at half maximum (FWHM) of DCRCs was measured on a cross array of points over epilayer surface The dislocation density of Hg 1-x Cd xTe thick epilayer is calculated using the FWHM values, therefore the map of the structural uniformity of Hg 1-x Cd xTe epilayers can be obtained in this way The structural uniformity of the thick Hg 1-x Cd xTe epilayers is also studied in the growth direction |
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| Keywords: | Structural quality Hg 1-x Cd xTe liquid phase epitaxy |
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