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实现变温扫描的扫描探针显微镜的发展与应用
引用本文:王静,李鸿琦,王守平,刘美华,郑治国,王世斌. 实现变温扫描的扫描探针显微镜的发展与应用[J]. 制造技术与机床, 2005, 0(10): 17-20
作者姓名:王静  李鸿琦  王守平  刘美华  郑治国  王世斌
作者单位:1. 天津大学机械学院实验力学研究室,天津,300072;解放军军事交通学院,天津,300161
2. 天津大学机械学院实验力学研究室,天津,300072
3. 解放军汽车管理学院,安徽,蚌埠,233011
4. 解放军军事交通学院,天津,300161
摘    要:将实现微尺度温度测量的技术按其温度控制方式分为两类,即控制探针的温度和控制样品的温度,所对应的仪器为扫描热显微镜和各类可直接应用于普通扫描探针显微镜的变温样品台,分别介绍其结构、工作原理及应用情况,分析了这两类具有不同控温方式的仪器的区别,并进一步讨论了目前在扫描探针显微镜变温辅助设备中仍然存在的问题以及实现变温扫描的扫描探针显微镜的发展前景.

关 键 词:扫描热显微镜  变温扫描  变温样品台  变温及控制系统  探针针尖
文章编号:51005
收稿时间:2004-10-11
修稿时间:2004-10-11

Development and Application of Variable -temperature Scanning Probe Microscope
WANG Jing,LI Hongqi,WANG Shouping,LIU Meihua,ZHENG Zhiguo,WANG Shibin. Development and Application of Variable -temperature Scanning Probe Microscope[J]. Manufacturing Technology & Machine Tool, 2005, 0(10): 17-20
Authors:WANG Jing  LI Hongqi  WANG Shouping  LIU Meihua  ZHENG Zhiguo  WANG Shibin
Abstract:We divide measuring techniques on temperature in micro- scale into two kinds in terms of temperature control mode, namely temperature control of probe and temperature control of sample, and the corresponding devices include scanning thermal microscope and variable - temperature sample stage that can be utilized in general scanning probe microscope directly. This paper introduces the structure, principle of work and application of these devices separately and analyzes the differences in two kinds of devices, furthermore, discusses the unsolved problems that lie in variable - temperature assistant devices of scanning probe microscope at present and development prospect of variable - temperature scanning probe microscope.
Keywords:Scanning Thermal Microscope    Variable - temperature Scanning    Variable - temperature Sample Stage   Variable - temperature and Control System   Tip of Probe
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