Synthesis of SnO2/Pd composite films by PVD route for a liquid petroleum gas sensor |
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| Authors: | S Gupta |
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| Affiliation: | Department of Materials Science, Indian Association for the Cultivation of Science, Calcutta 700 032, India |
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| Abstract: | Synthesis of SnO2/Pd composite films was carried out by depositing antimony doped SnO2 films by magnetron sputtering technique and evaporating a thin layer of palladium on the top of it. This bi-layer structure was subjected to rapid thermal annealing for the incorporation of Pd in SnO2. The films thus obtained were characterized by measuring electrical, optical and microstructural properties. Liquid petroleum gas-sensing properties were also investigated. |
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| Keywords: | SnO2 Sensor |
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