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The influence of Y ion implantation on the oxidation behaviour of ZrN coating
Authors:Q.G. Zhou  X.D. Bai  Y.H. Ling  J. Xu
Affiliation:a Department of Materials Science and Engineering, Tsinghua University, Beijing 100084, China
b Beijing Great Wall Ti-Gold Corporation, Beijing 100095, China
Abstract:The purpose of this work was to determine the influence of ion implantation on the oxidation resistance of ZrN coatings. Samples were prepared on AISI 304 stainless steel by cathodic arc deposition. They were submitted to Y implantation at 150 °C with various fluences using a metal vacuum vapour arc ion implanter. The oxidation behaviour of as-deposited and Y-implanted ZrN coatings was characterized by weight gain measurement. The oxidation resistance of the ZrN coating was reduced after it was implanted with yttrium at a low fluence but improved at higher fluence. X-ray photoemission spectroscopy and glancing angle X-ray diffraction were employed to analyze the valence states of the oxide scale and the phase composition of the oxidation layers. Yttrium implantation can greatly improve the oxidation resistance of the ZrN coating.
Keywords:Ion implantation   Zirconium nitride   Oxidation   MEVVA   Cathodic arc deposition
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