A continuum model for pumping performance of turbomolecular pumps in all flow regimes

In the present study a continuum model for one-dimensional plane Couette-Poiseuille flow is implemented to turbomolecular pumps in different flow regimes. Pumping performance of various turbomolecular pumps including 6 single rotors, a rotor-stator row, a rotor-stator-rotor row, and a multi-row with 13 alternative rotor-stator rows is considered here. The obtained results show that the model provides good quantitative values for pumping performance of turbomolecular pumps over the whole regimes ranging from molecular flow to transition to slip flow.