化学气相沉积制备ZnS块材料均匀性的研究

以硫化氢气体锌为原料，通过化学气相沉积制备了ＺｎＳ块材料，分析了ＺｎＳ的沉积过程研究了沉积参数中沉积温度、沉积区压力和硫化氢、锌蒸汽、载气氩气流量对ＺｎＳ厚度均匀性的影响规律，提出了改善ＺｎＳ厚度均匀性，抑制沉只表面球状物生长的途径。

A Study of the Uniformity of ZnS Bulk Material Prepared by Chemical Vapor Deposition

ZnS bulk materials were prepared by chemical vapor deposition from hydrogen sulphide and zine. The deposition process mechanism of ZnS was analysized. The effect of deposition parameters such as deposition temperature, pressure and flow rate of hydrogen sulphide, zinc vapor and argon gas on the thickness uniformity of ZnS was studied. The ways of improving the thickness uniformity of ZnS and avoiding the nodular growth of ZnS on deposition surface were proposed.