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Dynamics of nanosecond laser annealing of silicon |
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| Authors: | V. A. Pilipovich V. L. Malevich G. D. Ivlev V. V. Zhidkov |
| Affiliation: | (1) Institute of Electronics, Academy of Sciences of the Belorussian SSR, Minsk |
| Abstract: | On the basis of a numerical solution of the Stefan problem, the dynamics of nanosecond laser annealing of silicon is investigated.Translated from Inzhenerno-Fizicheskii Zhurnal, Vol. 48, No. 2, pp. 306–312, February, 1985. |
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