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基于柔性铰链结构的二维微动工作台研究
引用本文:王红艳,张建雄,戴学丰.基于柔性铰链结构的二维微动工作台研究[J].机床与液压,2007,35(4):50-52.
作者姓名:王红艳  张建雄  戴学丰
作者单位:1. 齐齐哈尔大学计算机与控制工程学院,黑龙江齐齐哈尔,161006
2. 大连理工大学机械工程学院,辽宁大连,116024
摘    要:重点介绍了一种基于PZT驱动的双柔性平行四连杆结构二维微动工作台.推导了柔性铰链各尺寸对固有频率的影响公式,并用有限元参数化分析方法,找到对固有频率影响较大的参数.将有限元模态分析值和实验测试结果相比较,探讨影响微动工作台动态性能的综合因素,为微动台的设计提供理论和实验依据.

关 键 词:微动工作台  柔性铰链  有限元分析  基于柔性  铰链结构  二维微动工作台  研究  Flexible  Double  Based  理论  设计  微动台  因素  综合  动态性能  比较  测试结果  实验  有限元模态分析  参数化  频率影响  方法
文章编号:1001-3881(2007)4-050-3
修稿时间:2006-04-12

Study on 2-D Micro-positioner Based on Double Flexible Hinges
WANG Hongyan,ZHANG Jianxiong,DAI Xuefeng.Study on 2-D Micro-positioner Based on Double Flexible Hinges[J].Machine Tool & Hydraulics,2007,35(4):50-52.
Authors:WANG Hongyan  ZHANG Jianxiong  DAI Xuefeng
Affiliation:1. School of Computer and Control Eng. , Qiqihar University, Qiqihar Heilongjiang 161006, China; 2. School of Mech. Eng. , Dalian Univ. of Technol. , Dalian Liaoning 116024, China
Abstract:A novel 2-D micro-positioner drived by PZT was introduced,which is based on the double flexible hinges in a structure of parallel four-linkage.The expression about the influence of dimension on the natural frequency of the worktable was deduced,and the parameters that effect the natural frequency greatly were found out by using FEA.The simulated results were compared with the corresponding experimental ones in order to analyze the factors influencing the dynamic properties,and it provides a theoretical and experimental basis for the design of micro-positioner.
Keywords:Miro-positioner  Flexure hinges  FEA
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