| 高速精密定位X-Y工件台动态精度分析 |
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| 引用本文： | 孙未. 高速精密定位X-Y工件台动态精度分析[J]. 机床与液压, 2007, 35(10): 85-87 |
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| 作者姓名： | 孙未 |
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| 作者单位： | 成都理工大学应用核技术及自动化工程学院机电工程系,成都,610059 |
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| 摘 要： | 根据高速精密X-Y工件台的工艺参数的特点,对高速精密定位X-Y工件台的动态精度进行分析,包括阶跃输入时间响应、频率响应、系统的动刚度kD的分析.并从结构及材料方面提出了使高速精密定位X-Y工件台达到良好技术性能指标的方法.
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| 关 键 词： | 高速精密定位 X-Y工件台 动态精度 精密定位 工件台 动态精度 精度分析 Stage Precision Positioning Accuracy Analysis 方法 技术性能指标 材料 结构 刚度 系统 频率响应 时间响应 阶跃输入 工艺参数 高速精密 |
| 文章编号： | 1001-3881（2007）10-085-3 |
| 修稿时间： | 2006-11-03 |
The Dynamic Accuracy Analysis of High-speed Precision Positioning X-Y Workpiece Stage |
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| SUN Wei. The Dynamic Accuracy Analysis of High-speed Precision Positioning X-Y Workpiece Stage[J]. Machine Tool & Hydraulics, 2007, 35(10): 85-87 |
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| Authors: | SUN Wei |
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| Affiliation: | The Department of Mechanical Engineering, College of Applied Nuclear Technology and Automation Engineering, Chengdu University of Technology, Chengdu 610059, China |
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| Abstract: | According to the characteristics of craft parameters of high-speed precision positioning X-Y workpiece stage, the dynamic state accuracy was analyzed, including the step function time response, the frequency response, and the dynamic stiffness kD of the system. The method to attain the good technique function index was put forward from the structure and material. |
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| Keywords: | High-speed precision positioning X-Y workpiece stage Dynamic accuracy analysis |
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