阳极氧化铝膜孔径的测量

论述了一种对阳极氧化铝膜孔径进行测定和评估的方法。此方法通过对已得的阳极氧化铝薄膜提取样本制备扫描电镜(SEM)图像进行处理和分析,最终得到膜孔的尺寸结果。阳极氧化铝膜的膜孔尺寸处在nm级别,对其测量误差的要求很高。而限于SEM的设备特性和精度,通过SEM读取的原始阳极氧化铝膜的图像存在着大量噪声(以椒盐噪声为主)。鉴于此,首先对阳极氧化铝膜的原始SEM图像进行多重滤波处理(中值滤波、各向异性扩散滤波以及阈值滤波),得到具有膜孔结构信息的阈值图像。经过多重滤波的这一阈值图像仍存在着很多污点,这些污点对阳极氧化铝膜膜孔尺寸的评估无任何意义,于是继续将阈值图像进行去污处理,最后通过设计的"染色"算法,实现了对膜孔尺寸的实际测量。实验证明,此方法的适用性较强。

Pore Size Measurement for Anode Aluminum Oxidized Membranes

A method to measure the pore size of anode aluminum oxidized(AAO) membranes was presented.The pore size was gotten through the image analysis of a sampled SEM image from an AAO membrane.Since the pore size of AAO membranes is on the scale of nano-meters,the accuracy of the measurement is required to be very high.However,due to the characteristics and the precision of the SEM system,there are many signal noises on the raw SEM images of AAO membrane,especially salt and pepper noises.In view of this problem,th...