ESD tester parasitics and stress conditions and their impact on device failure levels and failure mechanisms |
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| Authors: | S Daniel J-W Kim K-D Hong C-K Yoon |
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| Affiliation: | Samsung Electronics Co. Ltd., P.O. Box #37 Suwon 449-900, San #24 Nongseo-Lee, Kiheung-Eup, Yongin-Gun, Kyungki-Do, Republic of Korea |
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| Abstract: | A comparative study of Human Body and Machine Model (HBM/MM) testers is performed using a very large sample size for statistical significance. Failure mechanisms and types of damage are categorized with the use of photoemission spectrum analysis. Tester parasitic values are extracted for each machine, and a correlation is established to failure thresholds, distributions and failure mechanisms. |
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