A Novel 94-GHz MHEMT Resistive Mixer Using a Micromachined Ring Coupler

In this letter, we present a high performance 94-GHz millimeter-wave monolithic integrated circuit resistive mixer using a 70-nm metamorphic high electron mobility transistor (MHEMT) and micromachined ring coupler. A novel three-dimensional structure of a resistive mixer was proposed in this work, and the ring coupler with the surface micromachined dielectric-supported air-gap microstrip line structure was used for high local oscillator/radio frequency (LO–RF) isolation. Also, the LO–RF isolation was optimized through the simulation. The fabricated mixer has excellent LO–RF isolation, greater than 29 dB, in 2-GHz bandwidth of 93–95GHz. The good conversion loss of 8.9dB was measured at 94GHz. To our knowledge, compared to previously reported W-band mixers, the proposed MHEMT-based resistive mixer using a micromachined ring coupler has shown superior LO–RF isolation and conversion loss.